M304 – Area Scanner

M304 Large Area Projection Scanner

The M304 is a fully automated projection scanning system for imaging substrates up to 450x500mm. Utilizing Tamarack’s proven illumination system and broadband projection lens, the M304 delivers resolution below 3um with a large depth of focus, making it ideal for applications requiring large un-stitched exposures such as displays, touchscreens and probecards.

M304Tamarack’s M304 is advantageous over competitive systems in that it combines the best of projection lithography and mask aligners by utilizing a high-resolution projection lens with a full-substrate mask, thus enabling high-throughput exposure of substrates with excellent resolution, high DOF and high product yield without mask contamination.

Tamarack’s core projection scanning technology utilizes a diamond-shaped high-intensity homogenized beam that overlaps adjacent scans by 50%, eliminating matching and stitching errors that are problematic in other systems. Since the entire exposure takes place in one continuous step, the M304 surpasses the throughput performance of a traditional stepper, resulting in a reduced processing cost per chip — which ultimately translates into a lower total cost of ownership.

Key Features and Benefits of the M304 include:

  • broadband 1:1 catadioptric projection lens provides resolution < 3µm and a large depth of focus for accurate imaging of both thin and ultra-thick resists
  • ability to process substrates of any size up to 450mm x 500mm
  • high irradiance and excellent beam uniformity from a single UV arc lamp for accurate and economical imaging of  a variety of photoresists while maintaining high throughput
  • automated alignment accuracy to less than 1um, utilizing through-the-lens and off-axis vision optics coupled with Cognex’s pattern recognition system
  • ability to control resist sidewall angles by varying the numerical aperture (0.07-0.14) and focal position at the resist surface
  • selectable filters for the broadband illumination source and projection lens allow matching of wavelength to the specific resist characteristics
  • robotic substrate handling from  cassette or manual loading
  • automatic 14”/9” mask handling from mask library with capacity for 15 masks
  • large projection lens working distance prevents any contact with the substrate
  • intuitive and flexible control system that enables highly customized process automation
  • SECS/GEMM

Every M304 projection scanner is designed for a specific application, and Tamarack’s long time leadership in precision motion and position control assures superior handling regardless of platform. Tamarack’s staff of scientists and engineers is available to answer your most specific questions and applications.

To discuss your application in strict confidentiality, please contact us.