M500 Series – Roll 2 Roll

M500 Series Roll-2-Roll Excimer Laser Systems

M570Tamarack’s M500 Series delivers breakthrough processing performance, combining roll-to-roll material handling with the industry’s largest projection optics and high-power excimer lasers.  Utilizing Tamarack’s proven excimer beam delivery systems, the M500  is capable of processing up to 1 million ablation sites per hour.

Tamarack’s 5th Generation M500 Series provides outstanding performance and high-reliability in roll-to-roll excimer laser ablation processing.  These systems offer accurate, cost-effective, high throughput, roll-to-roll excimer laser ablation for a number of applications, including micro-machining, drilling, and laser processing of a variety of materials.

M500 Laser

The M500 series has the largest field of view in the industry, with the ability to ablate single sites up to 100mm in diameter. The      intuitive and flexible control system enables highly customized process automation, including the ability to process roll widths up to    300mm.  Additionally, the M500’s dynamic beam measurement and control ensures the accurate execution of stringent process  parameters.

Key features and benefits of the M500 Series include:

  • resolution to 2µm
  • micron-level alignment accuracy and pitch control
  • ultra-high throughput  processing of > 1 million ablation sites per hour
  • largest FOV in the industry (Ø 100mm), which improves throughput by reducing overheads and enabling the creation of large non-repeated patterns
  • large DOF for thick material processing with high aspect ratios
  • ability to process reels/rolls of material up to 300 mm wide, including wire
  • automated mask loading and mask library
  • available wavelengths of 248nm or 308nm utilizing the broadest range of excimer lasers in the market
  • configurable processing methods which allow for step & repeat, step & scan and continuous scanning to match process requirements

Tamarack’s staff of scientists and engineers is available to answer product questions, and to help you optimize the M500 system for your application. To discuss your application in strict confidentiality, please contact one of our sales engineers.