M440 Series – Line Beam

M440 Series Excimer Laser Line-Beam Systems

m414Tamarack’s M440 Series of excimer line-beam laser systems is engineered to provide superior reliability and performance in excimer laser line beam scanning for de-bonding and annealing. Each system in the M440 line is specifically designed for high volume, 24/7 line-beam scanning applications that require superior beam uniformity and high-efficiency beam delivery to furnish a high level of throughput while significantly reducing the cost of ownership over competitive systems.

The M440 Series delivers longer line-beams with more pulse energy to permit annealing of larger areas up to 750×1000 mm, with minimal mechanical and thermal loading on the substrate.  Each of the systems in the series incorporates Tamarack’s cutting-edge technology, providing unsurpassed performance and reliability while supplying highly uniform UV power.

The M440 Series are highly configurable systems with a wide choice of low to high-power excimer lasers of varying wavelengths. Its control systems are intuitive and flexible, and enable highly customized process automation. A variety of automatic loading options ensure optimal throughput for your application.

Key features and benefits of the M440 Series include:

  • delivery of superior line beam uniformity with beam widths ranging up to 300mm
  • dynamic beam measurement and control to ensure accurate execution of stringent process parameters
  • available wavelengths of 248nm or 308nm utilizing the broadest range of excimer lasers in the market
  • micron level stitching accuracy
  • substrate processing of any shape up to 750x1000mm
  • robotic wafer/substrate loading from FOUP, cassette or conveyor
  • SECS/GEMM

Tamarack’s staff of sales engineers is available to help you optimize the M440 system for your application.  To discuss your application in strict confidentiality, please contact us.